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Zhang, G. Q.

Mechanics of microelectronics / by G.Q. Zhang, W.D. van Driel and X.J. Fan. - Dordrecht : Springer, c2006. - xiii, 563 p. : ill. ; 25 cm. - Solid mechanics and its applications ; v. 141 . - Solid mechanics and its applications ; v. 141. .

State of the art report.

Includes bibliographical references.

ISBN: 140204934X (hd. bd.) 9781402049347 (hd. bd.) 1402049358 (e-book) 9781402049354 (e-book)

LCCN: 2007451142

Subjects--Topical Terms:
Microelectronics.
Mechanical engineering.

LC Class. No.: TK7874 / .Z427 2006

Dewey Class. No.: 621.381