| 000 -LEADER |
|---|
| fixed length control field |
02366cam a2200457Ii 4500 |
| 001 - CONTROL NUMBER |
|---|
| control field |
u14740 |
| 003 - CONTROL NUMBER IDENTIFIER |
|---|
| control field |
SA-PMU |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20210418123943.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
160718t20162016si a b 001 0 eng d |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
HNK |
| Language of cataloging |
eng |
| Description conventions |
rda |
| Transcribing agency |
HNK |
| Modifying agency |
VGM |
| -- |
OCLCF |
| -- |
YDXCP |
| -- |
BDX |
| -- |
BTCTA |
| 019 ## - |
|---|
| -- |
913768169 |
| -- |
914225516 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9789814669306 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
981466930X |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| Canceled/invalid ISBN |
9789814669313 |
| Qualifying information |
(ebook) |
| 035 ## - SYSTEM CONTROL NUMBER |
|---|
| System control number |
(OCoLC)953684183 |
| Canceled/invalid control number |
(OCoLC)913768169 |
| -- |
(OCoLC)914225516 |
| 050 #4 - LIBRARY OF CONGRESS CALL NUMBER |
|---|
| Classification number |
QC611.8.C64 |
| Item number |
T55 2016 |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Tiku, Shiban Kishan, |
| Relator term |
author. |
| 245 10 - TITLE STATEMENT |
|---|
| Title |
III-V integrated circuit fabrication technology / |
| Statement of responsibility, etc. |
Shiban Tiku, Dhrubes Biswas. |
| 246 3# - VARYING FORM OF TITLE |
|---|
| Title proper/short title |
Three-five integrated circuit fabrication technology |
| 246 3# - VARYING FORM OF TITLE |
|---|
| Title proper/short title |
3-5 integrated circuit fabrication technology |
| 264 #1 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE |
|---|
| Place of production, publication, distribution, manufacture |
Singapore : |
| Name of producer, publisher, distributor, manufacturer |
Pan Stanford Publishing, |
| Date of production, publication, distribution, manufacture, or copyright notice |
[2016] |
| 264 #4 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE |
|---|
| Date of production, publication, distribution, manufacture, or copyright notice |
©2016 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xxv, 687 pages : |
| Other physical details |
illustrations (some color) ; |
| Dimensions |
24 cm |
| 336 ## - CONTENT TYPE |
|---|
| Content type term |
text |
| Content type code |
txt |
| Source |
rdacontent |
| 337 ## - MEDIA TYPE |
|---|
| Media type term |
unmediated |
| Media type code |
n |
| Source |
rdamedia |
| 338 ## - CARRIER TYPE |
|---|
| Carrier type term |
volume |
| Carrier type code |
nc |
| Source |
rdacarrier |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc. note |
Includes bibliographical references and index. |
| 505 0# - FORMATTED CONTENTS NOTE |
|---|
| Formatted contents note |
1. Semiconductor basics -- 2. GaAs devices -- 3. Phase diagrams and crystal growth of compound semiconductors -- 4. Epitaxy -- 5. Photolithography -- 6. Wet etching, cleaning, and passivation -- 7. Plasma processing and dry etching -- 8. Deposition processes -- 9. Ion implantation and device isolation -- 10. Diffusion in III-V compound semiconductors -- 11. Ohmic contacts -- 12. Schottky diodes and FET processing -- 13. HEMT process -- 14. HBT processing -- 15. BiFET and BiHEMT processing -- 16. MOSFET processing -- 17. Passive components -- 18. Interconnect technology -- 19. Backend processing and through-wafer vias -- 20. Electroplating -- 21. Measurements and characterization -- 22. Reliability -- 23. GaN devices -- 24. RF MEMS. |
| 596 ## - |
|---|
| -- |
1 2 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Compound semiconductors. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Integrated circuits. |
| 650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Compound semiconductors. |
| Source of heading or term |
fast |
| Authority record control number or standard number |
(OCoLC)fst00871813 |
| 650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Integrated circuits. |
| Source of heading or term |
fast |
| Authority record control number or standard number |
(OCoLC)fst00975535 |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Biswas, Dhrubes, |
| Relator term |
author. |
| 938 ## - |
|---|
| -- |
Brodart |
| -- |
BROD |
| -- |
113314868 |
| 938 ## - |
|---|
| -- |
Baker and Taylor |
| -- |
BTCP |
| -- |
BK0017390214 |
| 938 ## - |
|---|
| -- |
YBP Library Services |
| -- |
YANK |
| -- |
12520793 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Koha item type |
Books |
| 994 ## - |
|---|
| -- |
Z0 |
| -- |
SUPMU |
| 948 ## - LOCAL PROCESSING INFORMATION (OCLC); SERIES PART DESIGNATOR (RLIN) |
|---|
| h (OCLC) |
NO HOLDINGS IN SUPMU - 16 OTHER HOLDINGS |