Zhang, G. Q. <br/><br/>
Mechanics of microelectronics / 
by G.Q. Zhang, W.D. van Driel and X.J. Fan. 
 - Dordrecht :  Springer,  c2006. 
 - xiii, 563 p. :  ill. ;  25 cm. 
 - Solid mechanics and its applications ;  v. 141 .
 - Solid mechanics and its applications ;  v. 141. .
<br/><br/> State of the art report. 
<br/><br/>Includes bibliographical references. 
<br/><br/><label>ISBN: </label>140204934X (hd. bd.) 9781402049347 (hd. bd.) 1402049358 (e-book) 9781402049354 (e-book) 
<br/><br/><label>LCCN: </label>2007451142 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics.<br/>Mechanical engineering.
<br/><br/><label>LC Class. No.: </label>TK7874  / .Z427 2006 
<br/><br/><label>Dewey Class. No.: </label>621.381