TY - BOOK AU - Duraffourg,Laurent AU - Arcamone,Julien TI - Nanoelectromechanical systems T2 - Electronics engineering series SN - 9781848216693 AV - TK7874.84 .D873 2015 U1 - 621.381 23 PY - 2015/// CY - London, Hoboken, NJ PB - ISTE, Wiley KW - Nanoelectromechanical systems KW - fast N1 - Includes bibliographical references and index ER -