Sze, S. M., 1936-

Semiconductor devices, physics and technology / S.M. Sze. - 2nd ed. - New York : Wiley, c2002. - viii, 564 p. : ill. (some col.) ; 26 cm.

Includes bibliographical references and index.

Semiconductor Devices Semiconductor Technology Semiconductor Physics -- Energy Bands and Carrier Concentration in Thermal Equilibrium Semiconductor Materials Basic Crystal Structure Basic Crystal Growth Technique Valence Bonds Energy Bands Intrinsic Carrier Concentration Donors and Acceptors Carrier Transport Phenomena Carrier Drift Carrier Diffusion Generation and Recombination Processes Continuity Equation Thermionic Emission Process Tunneling Process High-Field Effects Semiconductor Devices -- p--n Junction Basic Fabrication Steps Thermal Equilibrium Condition Depletion Region Depletion Capacitance Current-Voltage Characteristics Charge Storage and Transient Behavior Junction Breakdown Heterojunction Bipolar Transistor and Related Devices Transistor Action Static Characteristics of Bipolar Transistor Frequency Response and Switching of Bipolar Transistor Heterojunction Bipolar Transistor Thyristor and Related Power Devices MOSFET and Related Devices MOS Diode MOSFET Fundamentals MOSFET Scaling CMOS and BiCMOS MOSFET on Insulator MOS Memory Structures Power MOSFET MESFET and Related Devices Metal-Semiconductor Contacts MESFET MODFET Microwave Diodes, Quantum-Effect, and Hot-Electron Devices Basic Microwave Technology Tunnel Diode IMPATT Diode Transferred-Electron Devices Quantum-Effect Devices Hot-Electron Devices Photonic Devices Radiative Transitions and Optical Absorption Light-Emitting Diodes Semiconductor Laser Photodetector Solar Cell Semiconductor Technology -- Crystal Growth and Epitaxy Silicon Crystal Growth from the Melt Silicon Float-Zone Process GaAs Crystal-Growth Techniques Material Characterization Epitaxial-Growth Techniques Structures and Defects in Epitaxial Layers Film Formation Thermal Oxidation Dielectric Deposition Polysilicon Deposition Metallization Lithography and Etching Optical Lithography Next-Generation Lithographic Methods Wet Chemical Etching Dry Etching Microelectromechanical Systems Impurity Doping Basic Diffusion Process Extrinsic Diffusion Diffusion-Related Processes Range of Implanted Ions Implant Damage and Annealing Implantation-Related Processes Integrated Devices Passive Components Bipolar Technology Mosfet Technology Mesfet Technology Challenges for Microelectronics International Systems of Units (SI Units) Unit Prefixes Greek Alphabet Physical Constants Properties of Important Element and Binary Compound Semiconductors at 300 K Properties of Si and GaAs at 300 K Derivation of the Density of States in ar Semiconductor Derivation of Recombination Rate for Indirect Recombination Calculation of the Transmission Coefficient for a Symmetric Resonant-Tunneling Diode Basic Kinetic Theory of Gases 1.1 1 -- 1.2 7 -- Part I Chapter 2 17 -- 2.1 17 -- 2.2 19 -- 2.3 24 -- 2.4 27 -- 2.5 28 -- 2.6 34 -- 2.7 37 -- Chapter 3 47 -- 3.1 48 -- 3.2 57 -- 3.3 60 -- 3.4 66 -- 3.5 72 -- 3.6 73 -- 3.7 75 -- Part II Chapter 4 84 -- 4.1 85 -- 4.2 88 -- 4.3 93 -- 4.4 100 -- 4.5 104 -- 4.6 114 -- 4.7 117 -- 4.8 124 -- Chapter 5 130 -- 5.1 131 -- 5.2 137 -- 5.3 146 -- 5.4 151 -- 5.5 156 -- Chapter 6 169 -- 6.1 170 -- 6.2 186 -- 6.3 199 -- 6.4 205 -- 6.5 209 -- 6.6 214 -- 6.7 218 -- Chapter 7 224 -- 7.1 225 -- 7.2 237 -- 7.3 247 -- Chapter 8 254 -- 8.1 255 -- 8.2 259 -- 8.3 261 -- 8.4 264 -- 8.5 270 -- 8.6 275 -- Chapter 9 282 -- 9.1 282 -- 9.2 288 -- 9.3 298 -- 9.4 311 -- 9.5 318 -- Part III Chapter 10 332 -- 10.1 333 -- 10.2 339 -- 10.3 343 -- 10.4 347 -- 10.5 354 -- 10.6 361 -- Chapter 11 369 -- 11.1 370 -- 11.2 378 -- 11.3 388 -- 11.4 390 -- Chapter 12 404 -- 12.1 404 -- 12.2 418 -- 12.3 426 -- 12.4 431 -- 12.5 443 -- Chapter 13 452 -- 13.1 453 -- 13.2 462 -- 13.3 466 -- 13.4 469 -- 13.5 477 -- 13.6 481 -- Chapter 14 489 -- 14.1 491 -- 14.2 496 -- 14.3 503 -- 14.4 519 -- 14.5 522 -- Appendix B 533 -- Appendix C 534 -- Appendix D 535 -- Appendix E 536 -- Appendix F 537 -- Appendix G 538 -- Appendix H 539 -- Appendix I 541 -- Appendix J 543 -- Appendix K 545.

0471333727 (cloth : alk. paper) 9780471333722 (cloth : alk. paper)

2001026003


Semiconductors.

TK7871.85 / .S9883 2002

621.3815/2