000			03191cam a2200433 a 4500
001			u11993
003			SA-PMU
005			20210418124322.0
008			091021s2010 ne a b 000 0 eng
010			_a 2009939688
040			_aDLC _beng _cDLC _dYDXCP _dCDX _dMUU _dBTCTA _dMUU _dOCLCF _dOCLCQ
020			_a9789048125197 _q(alk. paper)
020			_a9048125197 _q(alk. paper)
035			_a(OCoLC)322495589
050	0	0	_aTJ940 _b.M43 2010
082	0	4	_a621.55
245	0	0	_aMechanics and physics of precise vacuum mechanisms / _cE.A. Deulin [and others].
260			_aDordrecht : _bSpringer, _c2010.
300			_axiv, 234 pages : _billustrations ; _c25 cm.
336			_atext _btxt _2rdacontent
337			_aunmediated _bn _2rdamedia
338			_avolume _bnc _2rdacarrier
490	1		_aFluid mechanics and its applications ; _vv. 91
504			_aIncludes bibliographical references.
520			_a"In this book the Russian expertise in the field of the design of precise vacuum mechanics is summarized. A wide range of physical applications of mechanism design in electronic, optical-electronic, chemical, and aerospace industries is presented in a comprehensible way. Topics treated include the method of microparticles flow regulation and its determination in vacuum equipment and mechanisms of electronics; precise mechanisms of nanoscale precision based on magnetic and electric rheology; precise harmonic rotary and not-coaxial nut-screw linear motion vacuum feedthroughs with technical parameters considered the best in the world; elastically deformed vacuum motion feedthroughs without friction couples usage; the computer system of vacuum mechanisms failure predicting. This English edition incorporates a number of features which should improve its usefulness as a textbook without changing the basic organization or the general philosophy of presentation of the subject matter of the original Russian work. Experience at the Bauman Moscow State Technical University and other schools shows that the book will be useful to engineering students who wish to prepare for more advanced studies and applications of vacuum science, technology and its applications."--Publisher's website.
505	0		_aUsing Precise Mechanisms in Modern Vacuum Technological Equipment;References -- Typical Vacuum Mechanisms -- Friction in Vacuum -- Matrix Method of the Design of New Mechanisms Structure -- Precision of Vacuum Mechanisms -- Vacuum Mechanisms of Nanoscale Precision -- Ultrahigh Vacuum Rotary-Motion Feedthroughs -- Ultrahigh Vacuum Non-Coaxial Linear-Motion Feedthroughs -- Vacuum Frictionless Mechanisms -- Flow of Microparticles Originating from Mechanisms in Vacuum.
650		0	_aVacuum technology.
650		7	_aVacuum technology. _2fast _0(OCoLC)fst01163626
700	1		_aDeulin, E. A.
830		0	_aFluid mechanics and its applications ; _vv.91.
938			_aBaker and Taylor _bBTCP _nBK0011818813
938			_aCoutts Information Services _bCOUT _n9697769 _c90.00 GBP
938			_aYBP Library Services _bYANK _n3031338
029	1		_aCDX _b9697769
942			_cBOOK
994			_aZ0 _bSUPMU
948			_hNO HOLDINGS IN SUPMU - 21 OTHER HOLDINGS
596			_a1
999			_c7238 _d7238