000			02175cam a2200445 a 4500
001			u5095
003			SA-PMU
005			20210418124745.0
008			050224s2005 ne a b 101 0 eng
010			_a 2005298034
040			_aUKM _beng _cUKM _dOHX _dDLC _dIXA _dBAKER _dBTCTA _dYDXCP _dNDD _dAGL _dZWZ _dNUKAT
020			_a1402030118
020			_a9781402030116
020			_a1402030126 (pbk.)
020			_a9781402030123 (pbk.)
035			_a(OCoLC)58453797 _z(OCoLC)144535442
042			_aukblsr _apcc
050	0	0	_aTK7871.85 _b.N3757 2004
082	0	4	_a621.38152 _222
111	2		_aNATO Advanced Research Workshop on Science and Technology of Semiconductor-on-Insulator Structures and Devices Operating in a Harsh Environment _d(2004 : _cKiev, Ukraine)
245	1	0	_aScience and technology of semiconductor-on-insulator structures and devices operating in a harsh environment / _cedited by Denis Falndre, Alexei N. Nazarov and Peter L.F. Hemment.
260			_aDordrecht ; _aLondon : _bKluwer Academic in cooperation with NATO Scientific Affairs Division, _c2005.
300			_ax, 348 p. : _bill. ; _c25 cm.
490	1		_aNATO science series. Series II, Mathematics, physics, and chemistry ; _vv. 185
500			_aPapers from the NATO Advanced Research Workshop on Science and Technology of Semiconductor-on-Insulator Structures and Devices Operating in a Harsh Environment.
504			_aIncludes bibliographical references and index.
650		0	_aSemiconductors _vCongresses.
650		0	_aInsulating materials _vCongresses.
650		0	_aSilicon-on-insulator technology _vCongresses.
700	1		_aFlandre, Denis.
700	1		_aNazarov, A. N. _q(Alexei N.)
700	1		_aHemment, P. L. F. _q(Peter L. F.)
710	2		_aNorth Atlantic Treaty Organization. _bScientific Affairs Division.
830		0	_aNATO science series. _nSeries II, _pMathematics, physics, and chemistry ; _vv. 185.
856	4	2	_3Publisher description _uhttp://catdir.loc.gov/catdir/enhancements/fy0663/2005298034-d.html
856	4	1	_3Table of contents only _uhttp://catdir.loc.gov/catdir/enhancements/fy0823/2005298034-t.html
942			_cBOOK
994			_aZ0 _bSUPMU
596			_a1
999			_c9530 _d9530