Mechanics of microelectronics / by G.Q. Zhang, W.D. van Driel and X.J. Fan.

By: Zhang, G. QContributor(s): Driel, W. D. van | Fan, X. JMaterial type: TextTextSeries: Solid mechanics and its applications: v. 141.Publisher: Dordrecht : Springer, c2006Description: xiii, 563 p. : ill. ; 25 cmISBN: 140204934X (hd. bd.); 9781402049347 (hd. bd.); 1402049358 (e-book); 9781402049354 (e-book)Subject(s): Microelectronics | Mechanical engineeringDDC classification: 621.381 LOC classification: TK7874 | .Z427 2006Online resources: Publisher description | Table of contents only
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TK7874 .Z427 2006 (Browse shelf (Opens below)) 1 Available STACKS 51952000122180

State of the art report.

Includes bibliographical references.

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